Wafer Transfer Solutions

Our wafer transfer mechanism illustrates 6 axes of motion under the power of our Micro Direct Drive motors.

Starting with the transfer mechanism itself, the see-thru construction provides a glimpse at the muscles underneath the enclosure. The base motor is a powerful MDH100 series direct drive servo motor. This product has the highest torque to size/weight ration of any similar product on the market. Motor construction and high-resolution absolute feedback provide the precision and power to rotate the upper extender arms. Each extender arm motor can be scaled in size as the carried load is reduced, thanks to the high-power density of the micro-direct drive motors (typically about 4 – 5 x the power density than similar motors). On the pin lifter axes, 3 small micro motors are couples with a lead screw to provide the coordinated lift of the wafer. The simplicity of this design eliminates gear reductions in the transfer mechanism and provides a light weight, precision mechanism to move wafers from one foup (front opening unified part) to the next (or any other transfer station or load lock). The micro direct drive motors are available with absolute or incremental encoders with resolution of 21 bits standard.