Ultra-High Vacuum Motors for Semiconductor Front-End Processing
One supplier for standard linear and rotary technologies
If you’re building next-gen semiconductor manufacturing, Nippon Pulse motors deliver:
- Vacuum Range of 10-3 to 10-5 Pa (10-6 to 10-7 Torr)
- Compact, high-torque direct drive rotary motors
- High-speed, nanometer-precision linear shaft motors
- Vacuum-rated materials and connectors
- Customizable configurations for your exact needs
- Tested. Proven with outgassing performance, clean class test, and gas composition analysis
Review Collateral Loss when using non-vacuum rated motors.
Have questions or an application you'd like to discuss? We can help.
Standard Vacuum Motor Solutions — for Cost-Effective Linear and Rotational Motion
Vacuum linear shaft motor, V350T series, 35mm shaft, rated for 1.0e-7 Pa vacuum, with an outgassing rate of 1.0e-7 Pa*m3/sec. Brushless DC linear servo motor with continuous force rating of 150N and peak for ce more than 530N.
Vacuum hybrid stepper motors sizes from NEMA 11 through Nema 23. Vacuum rated for 10-7 Torr at 125°C Ideal for clean room and vacuum rated environments.
Vacuum micro direct drive rotary servo motor ideal for vacuum and clean room environments with capabilities to operate in 10-7 Torr vacuum environment.
Nippon Vacuum Motors can be incorporated into numerous semiconductor processes:
- Wafer Transferring Systems
- Wafer handling robot
- Load lock
- Vacuum valves
- Wafer Positioning Systems
- Wafer aligners
- Wafer lift pins
- Turn tables
- Wafer Inspection Systems
- XY Stage
- Theta axis and indexing tables
