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Technical specifications

Part id460
Resolution1000, 500, 100, 50, 10 nm
Continuous force3.5 N
Force constant4.2 (Kf) N/Amps
Motor constant1.39 N√w
Maximum acceleration6 m/s²
Maximum velocity1.3 m/s
Stroke single forcer300 mm
Note 1Note 1: Repeatability +/- 2 counts sub 0.1 um @ Resolutions
Note 2Note 2: For 10nm resolution, max velocity of encoder is limited to 65mm/sec; for 50nm, the limit is 250mm/sec; and for 100nm (0.1μm), the limit is 500mm/sec.
Note 3Note 3: Please contact our Applications Engineers for loads exceeding 45.5kg.
Note 4Note 4: Stage specifications are based on the standard motor, the S080Q.
Stroke length300 mm
Accuracy12 µm
Moving mass2.2 kg
Bi directional repeatability±1 count
Load capacity45.5 kg
Straightness and flatness2/25mm
Linear shaft motorsS080Q

System drawing

SCR100-300 system drawing

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